Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9588066 | Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) | Heath A. Pois, David A. Reed, Bruno W. Schueler, Rodney Smedt | 2017-03-07 |