Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9588066 | Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) | Heath A. Pois, Bruno W. Schueler, Rodney Smedt, Jeffrey T. Fanton | 2017-03-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9588066 | Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) | Heath A. Pois, Bruno W. Schueler, Rodney Smedt, Jeffrey T. Fanton | 2017-03-07 |