Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9731958 | Microelectromechanical system and fabricating process having decoupling structure that includes attaching element for fastening to carrier | Fabien Filhol, Pierre-Olivier Lefort, Régis Quer, Bernard Chaumet | 2017-08-15 |
| 9574879 | MEMS angular inertial sensor operating in tuning fork mode | Bernard Chaumet, Fabien Filhol, Claude Rougeot | 2017-02-21 |