Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9731958 | Microelectromechanical system and fabricating process having decoupling structure that includes attaching element for fastening to carrier | Fabien Filhol, Bertrand Leverrier, Régis Quer, Bernard Chaumet | 2017-08-15 |