Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9811000 | Photolithography tool and method thereof | Chia-Feng Liao, Chun-Hsien Lin, Pei-Yi Su, Chung-Hsing Lee, Chien-Ko Liao +4 more | 2017-11-07 |
| 9707571 | Apparatus and method for supplying chemical solution on semiconductor substrate | Shih-Jhang Tian, Pei-Yi Su | 2017-07-18 |