Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9791775 | Lithography process on high topology features | Chun-Wei Chang, Hong-Da Lin, Chih-Chien Wang, Chun-Chang Chen, Hung-Chang Hsieh | 2017-10-17 |
| 9651869 | Film portion at wafer edge | Chun-Wei Chang, Hung-Chang Hsieh | 2017-05-16 |