Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9803274 | Process kit of physical vapor deposition chamber and fabricating method thereof | Shih Wei Bih, Wei-Jen Chen, Yen-Yu Chen, Chang-Sheng Lee, Wei-Chen Liao +1 more | 2017-10-31 |