Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9803274 | Process kit of physical vapor deposition chamber and fabricating method thereof | Shih Wei Bih, Wei-Jen Chen, Yen-Yu Chen, Hsien-Chieh Hsiao, Wei-Chen Liao +1 more | 2017-10-31 |
| 9611546 | Solid precursor delivery system | Chung-Liang Cheng, Chien-Hao Tseng, Yen-Yu Chen, Ching-Chia Wu, Wei Zhang | 2017-04-04 |
| 9553160 | Mechanisms for monitoring impurity in high-K dielectric film | Wei-Jen Chen, Yen-Yu Chen, Wei Zhang | 2017-01-24 |