Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9606451 | Exposure apparatus, photolithographical reticles and exposure methods thereof | Qiang Wu, Jing'an Hao, Huayong Hu, Yang Liu | 2017-03-28 |
| 9547236 | Patterning apparatus and patterning methods thereof | Qiang Wu, Huayong Hu, Jianhua Ju, Charles K. Lee | 2017-01-17 |