Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711529 | 3D NAND device and fabrication method thereof | Lei Ye | 2017-07-18 |
| 9645499 | Photoresist with top-coating photo-decomposable base for photolithography | — | 2017-05-09 |
| 9640446 | Semiconductor structure and fabrication method thereof | Lihua Ding, Weiming He | 2017-05-02 |
| 9606451 | Exposure apparatus, photolithographical reticles and exposure methods thereof | Qiang Wu, Chang-Miao Liu, Jing'an Hao, Yang Liu | 2017-03-28 |
| 9576828 | Heat reservoir chamber, and method for thermal treatment | Qiang Wu, DEPING KONG | 2017-02-21 |
| 9547236 | Patterning apparatus and patterning methods thereof | Qiang Wu, Chang-Miao Liu, Jianhua Ju, Charles K. Lee | 2017-01-17 |