Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9612530 | Method and system for design of enhanced edge slope patterns for charged particle beam lithography | Akira Fujimura, Kazuyuki Hagiwara, Ingo Bork | 2017-04-04 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9612530 | Method and system for design of enhanced edge slope patterns for charged particle beam lithography | Akira Fujimura, Kazuyuki Hagiwara, Ingo Bork | 2017-04-04 |