Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9612530 | Method and system for design of enhanced edge slope patterns for charged particle beam lithography | Akira Fujimura, Stephen F. Meier, Ingo Bork | 2017-04-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9612530 | Method and system for design of enhanced edge slope patterns for charged particle beam lithography | Akira Fujimura, Stephen F. Meier, Ingo Bork | 2017-04-04 |