Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837295 | Apparatus and method for semiconductor wafer leveling, force balancing and contact sensing | Gregory George, Michael B. Brennen | 2017-12-05 |
| 9640418 | Apparatus, system, and method for handling aligned wafer pairs | Gregory George | 2017-05-02 |