Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837295 | Apparatus and method for semiconductor wafer leveling, force balancing and contact sensing | Hale Johnson, Michael B. Brennen | 2017-12-05 |
| 9640418 | Apparatus, system, and method for handling aligned wafer pairs | Hale Johnson | 2017-05-02 |
| 9583374 | Debonding temporarily bonded semiconductor wafers | Christopher Rosenthal | 2017-02-28 |