Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793085 | Focused ion beam apparatus | Anto Yasaka, Tomokazu Kozakai, Yasuhiko Sugiyama, Kazuo Aita, Fumio Aramaki +1 more | 2017-10-17 |
| 9773634 | Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus | Tomokazu Kozakai, Yasuhiko Sugiyama, Kazuo Aita, Fumio Aramaki, Anto Yasaka +1 more | 2017-09-26 |
| 9583299 | Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus | Tomokazu Kozakai, Yasuhiko Sugiyama, Kazuo Aita, Fumio Aramaki, Anto Yasaka +1 more | 2017-02-28 |