Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793085 | Focused ion beam apparatus | Anto Yasaka, Tomokazu Kozakai, Osamu Matsuda, Kazuo Aita, Fumio Aramaki +1 more | 2017-10-17 |
| 9773634 | Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus | Tomokazu Kozakai, Osamu Matsuda, Kazuo Aita, Fumio Aramaki, Anto Yasaka +1 more | 2017-09-26 |
| 9773637 | Plasma ion source and charged particle beam apparatus | Hiroshi Oba, Mamoru Okabe | 2017-09-26 |
| 9773646 | Plasma ion source and charged particle beam apparatus | Hiroshi Oba, Mamoru Okabe | 2017-09-26 |
| 9640361 | Emitter structure, gas ion source and focused ion beam system | Anto Yasaka, Hiroshi Oba | 2017-05-02 |
| 9583299 | Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus | Tomokazu Kozakai, Osamu Matsuda, Kazuo Aita, Fumio Aramaki, Anto Yasaka +1 more | 2017-02-28 |