Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9791426 | Sensor apparatus for analyzing a gas mixture in a process chamber | Gerit Ebelsberger, Erhard Magori | 2017-10-17 |
| 9599557 | Dust line with optical sensor, and method for measuring the composition of dust | Alexander Michael Gigler, Remigiusz Pastusiak, Kerstin Wiesner | 2017-03-21 |