Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9791426 | Sensor apparatus for analyzing a gas mixture in a process chamber | Gerit Ebelsberger, Holger Hackstein | 2017-10-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9791426 | Sensor apparatus for analyzing a gas mixture in a process chamber | Gerit Ebelsberger, Holger Hackstein | 2017-10-17 |