Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829442 | Defect inspecting method, sorting method and producing method for photomask blank | Tsuneo Terasawa, Atsushi YOKOHATA, Daisuke Iwai, Hiroshi Fukuda | 2017-11-28 |
| 9829787 | Defect inspecting method, sorting method, and producing method for photomask blank | Tsuneo Terasawa, Hiroshi Fukuda, Daisuke Iwai, Atsushi YOKOHATA | 2017-11-28 |
| 9772551 | Evaluation method of defect size of photomask blank, selection method, and manufacturing method | Tsuneo Terasawa, Daisuke Iwai, Hiroshi Fukuda, Atsushi YOKOHATA | 2017-09-26 |