Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9741627 | Substrate etching apparatus and substrate analysis method | Katsuhiko Kawabata, Mitsumasa Ikeuchi, Sungjae Lee, Jin Kunika | 2017-08-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9741627 | Substrate etching apparatus and substrate analysis method | Katsuhiko Kawabata, Mitsumasa Ikeuchi, Sungjae Lee, Jin Kunika | 2017-08-22 |