Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9741627 | Substrate etching apparatus and substrate analysis method | Katsuhiko Kawabata, Takuma Hayashi, Mitsumasa Ikeuchi, Sungjae Lee | 2017-08-22 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9741627 | Substrate etching apparatus and substrate analysis method | Katsuhiko Kawabata, Takuma Hayashi, Mitsumasa Ikeuchi, Sungjae Lee | 2017-08-22 |