Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9777251 | Liquid composition for removing titanium nitride, semiconductor-element cleaning method using same, and semiconductor-element manufacturing method | Kenji Shimada | 2017-10-03 |
| 9644274 | Etching solution for copper or a compound comprised mainly of copper | Kunio Yube, Satoshi Okabe | 2017-05-09 |
| 9580818 | Etching liquid for film of multilayer structure containing copper layer and molybdenum layer | Satoshi Okabe, Masahide Matsubara, Kunio Yube | 2017-02-28 |