Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9803162 | Liquid composition for cleaning semiconductor device, and method for cleaning semiconductor device | — | 2017-10-31 |
| 9777251 | Liquid composition for removing titanium nitride, semiconductor-element cleaning method using same, and semiconductor-element manufacturing method | Satoshi Tamai | 2017-10-03 |
| 9587208 | Cleaning liquid composition, method for cleaning semiconductor element, and method for manufacturing semiconductor element | Kojiro Abe, Hiroshi Yoshida, Masaru Ohto | 2017-03-07 |