| 9837274 |
Hard-mask defined bit pattern substrate |
XiaoMin Yang, Shuaigang Xiao, Zhaoning Yu, Kim Y. Lee, David S. Kuo |
2017-12-05 |
| 9797924 |
Calibration standard with pre-determined features |
Gennady Gauzner, Zhaoning Yu, Nobuo Kurataka, David S. Kuo, Kim Y. Lee +1 more |
2017-10-24 |
| 9773520 |
Imprint pattern guided self-assembly of lamellar block copolymer for BPM |
XiaoMin Yang, Shuaigang Xiao, HongYing Wang, Kim Y. Lee |
2017-09-26 |
| 9626996 |
Block copolymer self-assembly for pattern density multiplication and rectification |
XiaoMin Yang, Zhaoning Yu, Kim Y. Lee, Michael Feldbaum, Wei-Li Hu +5 more |
2017-04-18 |
| 9620161 |
Apparatus and methods for aligned servo-related features |
Shuaigang Xiao, David S. Kuo, XiaoMin Yang, Kim Y. Lee, Koichi Wago |
2017-04-11 |