| 9837274 |
Hard-mask defined bit pattern substrate |
XiaoMin Yang, Shuaigang Xiao, Yautzong Hsu, Zhaoning Yu, Kim Y. Lee |
2017-12-05 |
| 9809887 |
Method of patterning a stack |
Michael Feldbaum, Justin Jia-Jen Hwu, Gennady Gauzner, Kim Y. Lee, Li-Ping Wang |
2017-11-07 |
| 9797924 |
Calibration standard with pre-determined features |
Gennady Gauzner, Zhaoning Yu, Nobuo Kurataka, Kim Y. Lee, Yautzong Hsu +1 more |
2017-10-24 |
| 9683295 |
Apparatuses and methods utilizing etch stop layers |
Michael Feldbaum, Koichi Wago, Gennady Gauzner, Kim Y. Lee |
2017-06-20 |
| 9626996 |
Block copolymer self-assembly for pattern density multiplication and rectification |
XiaoMin Yang, Zhaoning Yu, Kim Y. Lee, Michael Feldbaum, Yautzong Hsu +5 more |
2017-04-18 |
| 9620161 |
Apparatus and methods for aligned servo-related features |
Shuaigang Xiao, XiaoMin Yang, Kim Y. Lee, Yautzong Hsu, Koichi Wago |
2017-04-11 |
| 9605348 |
Apparatuses and methods utilizing etch stop layers |
Michael Feldbaum, Koichi Wago, Gennady Gauzner, Kim Y. Lee |
2017-03-28 |