Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9703199 | Substrate processing apparatus | Toru Asano, Yukio Toriyama, Takashi Taguchi | 2017-07-11 |
| 9687874 | Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units | Hiroyuki Ogura, Yoshiteru Fukutomi, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima | 2017-06-27 |