Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9687874 | Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Yoshiteru Fukutomi, Yasuo Kawamatsu, Hiromichi Nagashima | 2017-06-27 |