Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9802227 | Method of cleaning substrate processing apparatus | Kentaro Sugimoto | 2017-10-31 |
| 9740648 | Substrate treatment apparatus that controls respective units by master-slave method | Takuya Miyashita, Satoshi Segawa | 2017-08-22 |