Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9740648 | Substrate treatment apparatus that controls respective units by master-slave method | Satoshi Segawa, Naoyuki Osada | 2017-08-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9740648 | Substrate treatment apparatus that controls respective units by master-slave method | Satoshi Segawa, Naoyuki Osada | 2017-08-22 |