Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9570364 | Method of detecting focus shift in lithography process, method of analyzing error of transferred pattern using the same and method of manufacturing semiconductor device using the methods | Yong-jin Chun, Byoung Il Choi | 2017-02-14 |
| 9557637 | Method of designing patterns of semiconductor devices in consideration of pattern density | Joong Won Jeon, Ji-Youn Song, Mun-Su Shin, Seong-Yul Park | 2017-01-31 |