Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9676892 | Polymers for hard masks, hard mask compositions including the same, and methods for forming a pattern of a semiconductor device using a hard mask composition | Myeong-koo Kim, Ahreum Choi, Boodeuk Kim, Jungsik Choi | 2017-06-13 |