Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9773673 | Composition for manufacturing semiconductor device and method of manufacturing semiconductor device using the composition | Jin Young Park, Hyun-Woo Kim | 2017-09-26 |
| 9676892 | Polymers for hard masks, hard mask compositions including the same, and methods for forming a pattern of a semiconductor device using a hard mask composition | Ahreum Choi, Boodeuk Kim, Songse YI, Jungsik Choi | 2017-06-13 |