Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9695347 | Slurry composition for chemical mechanical polishing of metal and polishing method using the same | Homer Chou, Won-Lae Kim, In Kyung Lee, Tae Young Lee | 2017-07-04 |
| 9593260 | CMP slurry composition for polishing copper, and polishing method using same | Dong-Hun Kang, Tae Wan Kim, Jeong Hwan Jeong, Young Nam Choi, Chang-Ki Hong | 2017-03-14 |