Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9754806 | Apparatus for treating wafers using supercritical fluid | Hyo-San Lee, Kun-Tack Lee, Jeong-Nam Han | 2017-09-05 |
| 9593260 | CMP slurry composition for polishing copper, and polishing method using same | Jong Il Noh, Dong-Hun Kang, Tae Wan Kim, Jeong Hwan Jeong, Young Nam Choi | 2017-03-14 |