Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9766540 | Method of forming photomask | Jong-Keun Oh, Hyungho Ko, Inkyun SHIN, JunYoul Choi | 2017-09-19 |
| 9703186 | Mask including pellicle, pellicle repairing apparatus, and substrate manufacturing equipment | Mun Ja Kim, Byunggook Kim, Jongju Park | 2017-07-11 |
| 9612528 | Methods of manufacturing pellicles having graphite layers | Munja Kim, Byunggook Kim | 2017-04-04 |