Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9703186 | Mask including pellicle, pellicle repairing apparatus, and substrate manufacturing equipment | Mun Ja Kim, Jongju Park, Jaehyuck Choi | 2017-07-11 |
| 9612528 | Methods of manufacturing pellicles having graphite layers | Munja Kim, Jaehyuck Choi | 2017-04-04 |