Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9543183 | Heated electrostatic chuck and semiconductor wafer heater and methods for manufacturing same | Kevin Argabright, James E. LaRoche, III, Mahmood Naim, David Hammerich, John R. Miller | 2017-01-10 |