Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9790581 | Emissivity controlled coatings for semiconductor chamber components | David Hammerich | 2017-10-17 |
| 9543183 | Heated electrostatic chuck and semiconductor wafer heater and methods for manufacturing same | Jae Yong Cho, Kevin Argabright, James E. LaRoche, III, David Hammerich, John R. Miller | 2017-01-10 |