Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9716047 | Method of measuring a substrate and method of manufacturing a semiconductor device using the same | Chol-Min Jhon, Seok Han Park, Yang Kyu Kim, Jae-Young Lee | 2017-07-25 |
| 9543151 | Ionizer and substrate transfer system having the same, and method of manufacturing a semiconductor device using the same | Jae Wook Lee | 2017-01-10 |
| 9543179 | Load port module | Chol-Min Jhon, Sung-Sick An, Yong Chul Lee, Mi-Jung Jeon | 2017-01-10 |