Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9716047 | Method of measuring a substrate and method of manufacturing a semiconductor device using the same | Seok Han Park, Ho-Hyung Jung, Yang Kyu Kim, Jae-Young Lee | 2017-07-25 |
| 9543179 | Load port module | Ho-Hyung Jung, Sung-Sick An, Yong Chul Lee, Mi-Jung Jeon | 2017-01-10 |