Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9802400 | Orientation control layer formed on a free top surface of a first block copolymer from a mixture of first and second block copolymers | Peter Trefonas, III, Rahul Sharma, Phillip D. Hustad, Mingqi Li | 2017-10-31 |
| 9696622 | Compositions and processes for immersion lithography | — | 2017-07-04 |
| 9696627 | Compositions comprising base-reactive component and processes for photolithography | Jinrong Liu, Cong Liu, Doris Kang, Anthony Zampini, Cheng-Bai Xu | 2017-07-04 |
| 9562169 | Metal hardmask compositions | Jibin Sun, Peter Trefonas, III, Kathleen M. O'Connell | 2017-02-07 |
| 9563126 | Hardmask | Shintaro Yamada, Sabrina Wong, Cong Liu, Cheng-Bai Xu | 2017-02-07 |
| 9563128 | Compositions and processes for immersion lithography | — | 2017-02-07 |