Issued Patents 2017
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9760011 | Pattern trimming compositions and methods | Kevin Rowell, Cong Liu, Irvinder Kaur, Jong Keun Park | 2017-09-12 |
| 9753370 | Multiple-pattern forming methods | Chang-Young Hong, Jung Woo Kim, Cong Liu, Shintaro Yamada, Lori Anne Joesten +3 more | 2017-09-05 |
| 9720321 | Lactone photoacid generators and resins and photoresists comprising same | Emad Aqad, Mingqi Li, Cong Liu | 2017-08-01 |
| 9696627 | Compositions comprising base-reactive component and processes for photolithography | Deyan Wang, Jinrong Liu, Cong Liu, Doris Kang, Anthony Zampini | 2017-07-04 |
| 9671689 | Cholate photoacid generators and photoresists comprising same | Emad Aqad, Mingqi Li, Joseph Mattia | 2017-06-06 |
| 9666436 | Ion implantation methods | Cheng-Han Wu, Dong Won Chung, Yoshihiro Yamamoto | 2017-05-30 |
| 9583344 | Photoresist pattern trimming methods | — | 2017-02-28 |
| 9581904 | Photoresist overcoat compositions | Choong-Bong Lee, Stefan J. Caporale, Jason A. DeSisto, Jong Keun Park, Cong Liu +1 more | 2017-02-28 |
| 9563126 | Hardmask | Shintaro Yamada, Deyan Wang, Sabrina Wong, Cong Liu | 2017-02-07 |
| 9558987 | Gap-fill methods | Jae Hwan Sim, Jin Hong Park, Jae-Bong Lim, Jung Kyu Jo, Jong Keun Park +2 more | 2017-01-31 |
| 9541834 | Ionic thermal acid generators for low temperature applications | Gerhard Pohlers, Cong Liu, Kevin Rowell, Irvinder Kaur | 2017-01-10 |