Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9725309 | Micromechanical sensor device and corresponding manufacturing method | Jochen Reinmuth | 2017-08-08 |
| 9670055 | Micromechanical sensor unit and method for manufacturing micromechanical sensor units | Jochen Reinmuth | 2017-06-06 |
| 9650240 | Component including two semiconductor elements, which are bonded to one another via a structured bonding layer, and method for manufacturing a component of this type | Mirko Hattass, Heiko Stahl, Jochen Reinmuth, Johannes Classen | 2017-05-16 |
| 9593011 | Micromechanical component and method for producing a micromechanical component | Heribert Weber | 2017-03-14 |
| 9567205 | Micromechanical sensor device with a getter in an enclosed cavity | Jochen Reinmuth | 2017-02-14 |
| 9567212 | Micromechanical component | Jochen Reinmuth, Kathrin Gutsche, Jens Frey, Heribert Weber | 2017-02-14 |