Issued Patents 2017
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9790084 | Micromechanical sensor device | Arnd Kaelberer | 2017-10-17 |
| 9751751 | Micromechanical component and method for manufacturing same | Johannes Classen | 2017-09-05 |
| 9725309 | Micromechanical sensor device and corresponding manufacturing method | Julian Gonska | 2017-08-08 |
| 9709451 | Micromechanical pressure sensor device and corresponding manufacturing method | Arnd Kaelberer, Johannes Classen | 2017-07-18 |
| 9688527 | Micromechanical component and method for producing a micromechanical component | Jens Frey | 2017-06-27 |
| 9670055 | Micromechanical sensor unit and method for manufacturing micromechanical sensor units | Julian Gonska | 2017-06-06 |
| 9650240 | Component including two semiconductor elements, which are bonded to one another via a structured bonding layer, and method for manufacturing a component of this type | Mirko Hattass, Heiko Stahl, Julian Gonska, Johannes Classen | 2017-05-16 |
| 9606141 | Micromechanical sensor device | Jens Frey, Arnd Kaelberer, Johannes Classen | 2017-03-28 |
| 9567205 | Micromechanical sensor device with a getter in an enclosed cavity | Julian Gonska | 2017-02-14 |
| 9567212 | Micromechanical component | Julian Gonska, Kathrin Gutsche, Jens Frey, Heribert Weber | 2017-02-14 |