Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812289 | Method for evaluating charged particle beam drawing apparatus | Satoru Hirose | 2017-11-07 |
| 9633820 | Method for forming resist film and charged particle beam writing method | Hirohito Anze | 2017-04-25 |