Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633820 | Method for forming resist film and charged particle beam writing method | Takayuki Ohnishi | 2017-04-25 |
| 9581893 | Mask manufacturing method, mask substrate, and charged beam drawing method | — | 2017-02-28 |