Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653262 | Method of measuring beam position of multi charged particle beam, and multi charged particle beam writing apparatus | Kenji Ohtoshi | 2017-05-16 |
| 9536705 | Method for correcting drift of charged particle beam, and charged particle beam writing apparatus | — | 2017-01-03 |