Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653262 | Method of measuring beam position of multi charged particle beam, and multi charged particle beam writing apparatus | Osamu Iizuka | 2017-05-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653262 | Method of measuring beam position of multi charged particle beam, and multi charged particle beam writing apparatus | Osamu Iizuka | 2017-05-16 |