Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9695513 | Hydrophobization treatment apparatus, hydrophobization treatment method, and hydrophobization treatment recording medium | — | 2017-07-04 |
| 9558960 | Substrate processing method, non-transitory storage medium and heating apparatus | Takahiro Shiozawa | 2017-01-31 |
| 9552987 | Substrate processing method, substrate processing apparatus, and storage medium | Yuichiro MIYATA, Keiichi Tanaka, Takahiro Shiozawa | 2017-01-24 |