Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9558960 | Substrate processing method, non-transitory storage medium and heating apparatus | Kenichi Ueda | 2017-01-31 |
| 9552987 | Substrate processing method, substrate processing apparatus, and storage medium | Yuichiro MIYATA, Keiichi Tanaka, Kenichi Ueda | 2017-01-24 |